CUSTOM VACUUM CHAMBERS

& COMPONENTS

  • AIT custom designs, fabricates and tests for UHV, UHV and XHV class vacuum chambers with flanges and ports as required.

  • AIT also fabricates:

    • Load-lock Chambers with linear motion magnetic transfer arm with susceptor and wafer up/down lifter

    • High Vacuum Heaters

    • UHV and XHV rotary and linear feedthroughs

    • Adjustable-angle and telescoping mounts for sputter cathodes

    • High Vacuum rotational/translation substrate holder stages

    • Optical feedthrough port aligners

    • Electrical feedthrough ports

 

Tel: (852) 2719-5440

Fax: (852) 2358-4766

1901 Sunley Center, 9 Wing Yin Street, Tsuen Wan, Hong Kong

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